• 사양 (표준)

  1. Thermal CVD Auto Operation system

  2. Both End chamber(Stainess) - All parts cooling by water

  3. Quartz Main chamber

  4. Gas control unit ( Mass flow controller) - 3channel standard

  5. 340liter/min Oil rotary pump

  6. Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
     with controller

  7. Programmable Temperature controller

  8. High Temperature Furnace(Max1200℃)

  9. Rapid Cooling system by furnace moving

  10. Atmospheric and Vacuum Processing

  11. Anti-contamination system by inner tube

  12. Vacuum gauge unit(Capacitance/Convectron)

  13. 1 year warranty

  14. On-site install and training

  15. System Program ( Auto processing system)

  16. Furnace for source evaporation

  17. Safety interlock system(Water / Air)

• 사양 (추가)

  1. Max temp 1500℃ Furnace by SIC source

  2. Rapid thermal processing furnace by IR lamp source

  3. MF power induction heating process Max temp 1600℃

  4. MFC(Mass flow controller) addition total 12channel

  5. Dry vacuum pump ( Scroll / booster / industry)

  6. Gas Safety interlock system for gas leak

  7. RF plasma ( ICP type )

  8. Tungsten filament gas source cracking

  9. High Vacuum processing option
     (Pump/Gauge/valve unit)

  10. Source delivery system ( Bubbler / Gas / Solid )

  11. System Utility ( Chiller / scrubber / gas cabinet )

• 소모품
  1. 

     K-type Thermocouple (Option : R-type)

  2. 

     Furnace heating element (Furnace repair)

  3. 

     Vacuum sensor

  4. 

     Oil in Rotary Oil Pump

  5. 

     O-ring

  6. 

     Quartz tube

추후 오픈 예정입니다.