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TCVD-D100CA 2300(W) x 1770(H) x 750(D)
  • 2300(W) x 1770(H) x 750(D)
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Thermal Chemical
Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
  • Size (mm) : 2300(W) x 1770(H) x 750(D)
  • Advanced Computer Controlled Automatic System
  • Optimized for graphene, CNT, h-BN TMDC growth
  • Water-cooled end chambers and doors
  • Process Temperature: ~1,100 ℃
  • Uniformity of Film Thickness : ≤+-3%
  • Testing Uniformity : ≤+-3%
  • Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.

You can see the image to the left or right by turning the equipment

    Dual Furnace System The TCVD-D100CA is optimized to produce TMDC materials such as h-BN, MoS2, WSe2.
    Automatic Furnace Moving System The Furnace is designed to move back and forth on dual rail system. In addition, precision sensors allow automatic movement on level position. This system allows fast-heating and fast-cooling.
    Safety Cabinet, Emergency
    Shut-off System(Option)
    The safety cabinet is a total enclosure for the system with an emergency shut-off button. It can protect the user(s) in dangerous situations.
    Smart System 12” Dual-core performance PC system. Able to control remotely.
    Able to Produce
    High Quality Graphene
    and Other 2D Materials
    Able to support growth of high quality
    graphene as well as other 2D materials with
    safety features.
      • Standard features
        1. Thermal CVD Auto Operation system

        2. Both End chamber(Stainess) - All parts cooling by water

        3. Quartz Main chamber

        4. Gas control unit ( Mass flow controller) - 3channel standard

        5. 340liter/min Oil rotary pump

        6. Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
          with controller

        7. Programmable Temperature controller

        8. High Temperature Furnace(Max1200℃)

        9. Rapid Cooling system by furnace moving

        10. Atmospheric and Vacuum Processing

        11. Anti-contamination system by inner tube

        12. Vacuum gauge unit(Capacitance/Convectron)

        13. 1 year warranty

        14. On-site install and training

        15. System Program ( Auto processing system)

        16. Furnace for source evaporation

        17. Safety interlock system(Water / Air)

      • Options
        1. Max temp 1500℃ Furnace by SIC source

        2. Rapid thermal processing furnace by IR lamp source

        3. MF power induction heating process Max temp 1600℃

        4. MFC(Mass flow controller) addition total 12channel

        5. Dry vacuum pump ( Scroll / booster / industry)

        6. Gas Safety interlock system for gas leak

        7. RF plasma ( ICP type )

        8. Tungsten filament gas source cracking

        9. High Vacuum processing option
          (Pump/Gauge/valve unit)

        10. Source delivery system ( Bubbler / Gas / Solid )

        11. System Utility ( Chiller / scrubber / gas cabinet )

      • Consumable parts
        1. K-type Thermocouple (Option : R-type)

        2. Furnace heating element (Furnace repair)

        3. Vacuum sensor

        4. Oil in Rotary Oil Pump

        5. O-ring

        6. Quartz tube

    • Facility requirements


    • Layout
    • Standard Warranty

      Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.

    • Delivery Time & Shipping Policy

      The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.

    • Equipment Purchasing Process
      • 1
        Request Quote

      • 2
        Confirm Quote Details with Purchase Order
      • 3
        Invoice / Payment

        Send Invoice and Payment information

      • 4
        System Production Initiated with Down Payment

        Training program offered

      • 5
        Equipment Operation Test / Export packaging & shipment

        Upon completion of system production, factory operation test performed.

      • 6
        Express Air Shipment & Delivery

        Estimated delivery
        – 4 business days

    • FAQ




    Please email to for sample/equipment inquiries


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