You can see the image to the left or right by turning the equipment
|Electrical power||220VAC 1ph 30A|
|Compressed air input size||6 mm one touch fitting|
|Cooling water in/out||3/8" lok fitting (ø10)|
|cooling water flow||Air temp 5~7liter/min|
|cooling water pressure||0.1~0.2Mpa|
|Safety exhaust size|
|Gas input pressure||40psi|
|Gas port||4ch standard (Option 2ch Expansion)|
|Gas port Size||1/4"VCR fitting|
|Rotary pump capacity||550liter/min(formblin)|
|Dry pump exhaust||RF 600watt|
Each system is delivered with a limited warranty that covers parts, excluding consumable and wearable parts such as quartz ware and O-rings, for one (1) year from the date of commissioning of the system. Any parts confirmed to be defective will be sent to customer for replacement during the warranty period. *Note: Any unauthorized modification of the system will result in the voiding of warranty.
The delivery time is estimated to be 8-12 weeks upon receipt of order. Graphene Square Inc. ships each system to the customer site by Incoterms CIP (Carriage & Insurance Paid) air freight direct from its factory in Korea.
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Training program offered
Upon completion of system production, factory operation test performed.
– 4 business days
Graphene Square Inc.
Rm 216-1, Bldg. 104
Inter-University Semiconductor Research Center
Seoul National University, 1 Gwanak-ro
Seoul 151-742, South Korea email@example.com TEL +82-2-880-6569 FAX +82-070-5080-0292
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