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TCVD 50B

TCVD 50B

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Features
Size (mm): 1500(W) x 893(H) x 590(D)
Economic & space-saving model.
Optimized for graphene, CNT, h-BN TMDC growth.
Water-cooled end chambers doors.
Process Temperature: ~1,100℃
Protective design from heat
Uniformity of Film Thickness: ≤+-3%
Testing Uniformity: ≤+-3%
Movable furnace method is our unique knowhow for fast heating fast cooling of the sample

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2-Inch Table-Top Manual Type Thermal CVD
This small-size equipment has been developed on customers’ dem for the lower cost but higher quality synthesis of graphene 2D materials. TCVD-50B is the most ideal system for researchers who are limited in budget. The versatile specifications from fully manual to semi-automatic systems can be adjusted to fit the customers’ budget. We recommend this system for training or laboratory classes, the detailed instructing program materials will be provided upon purchase.

TCVD-50B

  • Furnace ( Heater )

    Furnace ( Heater )
    • Heating element
      Kantal-A1 (~1050°C), SIC (~1300°C), Super Kantal (~1600°C)
    • Heater insulation
      Ceramic Fiber
    • Heater power
      220V 1Phase 3.5kW
    • Heater zone type
      1 zone
    • Quartz tube size
      φ 50mm - 100mm, 300mm / φ 100mm - 150mm, 350mm
    • Thermocouple (expendable)
      K-type single wire 1ea (~1100°C) / R-type (~1500°C)
    • Recommended temperature
      1000°C (Kantal-A1)
    • Quartz tube size(mm)
      φ - 25, 50, 75, 100, etc. / Length - 800, 1200, 1500, 1800, etc.
    • Rail applied
      Rapid cooling or rapid heating

  • TCVD Controller Panel

    TCVD Controller Panel
    • System status
    • System Valve Controller / Vacuum indicator
    • Furnace temperature controller

  • TCVD Vacuum/Gas Control

    • Rotary pump - W2V40 (*RP)

      Rotary pump - W2V40 (*RP)
      Pumping speed: 400 l/min
      Pump oil: fomblin oil

    • Rotary pump auto vent valve

      Rotary pump auto vent valve
      240 V AC (Normal open type)

    • Angle valve - NW 40

      Angle valve - NW 40
      port, Pneumatic type

    • MFC (Atovac AFC500)

      MFC (Atovac AFC500)
      a. MFC1 : Ar (1000 SCCM )
      b. MFC2 : CH4 (200 SCCM )
      c. MFC3 : H2 (100 SCCM ) 


      Pneumatic Valve
      a. Ar    input valve
      b. CH4    input valve
      c. H2    input valve
      d. Vent valve
      e. Main Gas input valve

  • Gas Module

    Gas Module
    • Bubbler carrier gas line
    • Bubbler gas line
    • Vent valve
    • Pneumatic Type (4~6kgf/cm3)
    • Bubbler
    • Main gas valve
    • Pneumatic Type (4~6kgf/cm3)
    • Gas manifold
    • Gas valve
    • Max 6 channel
    • Pneumatic Type (4~6kgf/cm3)
    • MFC (Atovac AFC-500)
    • Port - ¼" VCR type

  • Utility Area

    Utility Area
    • Pneumatic pressure switch - TCP SPS-206-01 (*Air Pressure Low)
      Control range : 0~0.6 MPa / Set pressure : 0.3 Mpa
    • Pneumatic regulator
      SYM BW20 (0.05~0.85MPa)
    • Solenoid valve
      Normal close , DC 24V / φ 4mm one touch fitting
    • Water pressure switch - TCP SPS-203-01(*Water Pressure Low)
      Control range : 0~0.3 MPa / Set pressure : 0.2 Mpa
    • Pneumatic port
      φ 6mm one touch fitting
    • Solenoid valve
      Normal close , DC 24V, / φ 4mm one touch fitting
    • Cooling water in/out port
      φ 3/8inch lock fitting
    • Angle valve - NW 40
      port, Pneumatic type

  • Sample Loading End Chamber

    Sample Loading End Chamber
    • Vacuum gauge sensor
      baratron gauge
    • Sample loading door
    • Cooling water in/out port
    • Vacuum gauge for vacuum pressure control valve
      full Scale range: 10 Torr
      lowest suggested pressure for reading: 1 x 10-3 Torr
      lowest suggested pressure for control: 10 Torr
    • Angle valve NW 40 port

  • Gas Supply End Chamber

    Gas Supply End Chamber
    • Door
    • Gas Input port
      ¼ Inch Lock Type Fitting
    • Cooling Water In/Out Port
    • Convection Gauge
      CVG101 (ATM ~ 1 x 12-3)
    • Angle valve NW 40 port

  • Electric Power Panel

    Electric Power Panel
    • Main power magnet switch
      LS GMC-32
    • Rotary pump power magnet
      switch - LS GMC-9 / GTH-22(4~6A)
    • Furnace power magnet switch
      LS GMC-22
    • Main power circuit breaker
      LS ABS-32b (30A)
    • SMPS DC 24 V
      Suntronics VSF30-24

  • TCVD Error Alarm Singnal

    TCVD Error Alarm Singnal
    • When Heater Power Failure, Light Indicator is ON
    • When Heater Over Temp, Light is ON
    • When Cooling Water Light is ON
    • Pneumatic Alarm Light is ON
    • When Rotary pump overcurrent alarm light is ON

  • TCVD Service Tool Box Components

    TCVD Service Tool Box Components
    • Thermocouple 3EA, O-ring, Extra Lamp, Allen wrench, Bolts nuts Etc.

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