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TCVD D100CA

TCVD D100CA

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Features
Size (mm): 2300(W) x 1770(H) x 750(D)
Advanced Computer Controlled Automatic System
Optimized for graphene, CNT, h-BN TMDC growth
Water-cooled end chambers doors
Process Temperature: ~1,100 ºC
Uniformity of Film Thickness: ≤+-3%
Testing Uniformity: ≤+-3%
Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.
Stard safety box
*Price will be determined after consultation. (Different customization from the stard parts will affect the overall price.)

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4-Inch Automatic Dual-Furnace CVD System for TMDC Synthesis
TCVD-D100CA is an advanced equipment dedicated to the growth of TMDC materials such as MoS2, WSe2, etc. The computer-aided controlling module promises the reliable growth condition for multiple users. The movable dual furnace system enables the fast heating fast cooling of source materials substrates, which is important for the synthesis of higher quality TMDCs. The safety housing with emergency alarm/stop functions will ensure the safe operation by users.

TCVD-D100CA

  • Furnace ( Heater )

    Furnace ( Heater )
    • Heating element
      Kantal-A1 (~1050°C), SIC (~1300°C), Super Kantal (~1600°C)
    • Heater insulation
      Ceramic Fiber
    • Heater power
      220V 1Phase 3.5kW
    • Heater zone type
      1 zone
    • Quartz tube size
      φ 50mm - 100mm, 300mm / φ 100mm - 150mm, 350mm
    • Thermocouple (expendable)
      K-type single wire 1ea (~1100°C) / R-type (~1500°C)
    • Recommended temperature
      1000°C (Kantal-A1)
    • Quartz tube size(mm)
      φ - 25, 50, 75, 100, etc. / Length - 800, 1200, 1500, 1800, etc.
    • Rail applied
      Rapid cooling or rapid heating

  • TCVD Controller Panel

    TCVD Controller Panel
    • System status
    • System Valve Controller / Vacuum indicator
    • Furnace temperature controller

  • TCVD Vacuum/Gas Control

    • Rotary pump - W2V40 (*RP)

      Rotary pump - W2V40 (*RP)
      Pumping speed: 400 l/min
      Pump oil: fomblin oil

    • Rotary pump auto vent valve

      Rotary pump auto vent valve
      240 V AC (Normal open type)

    • Angle valve - NW 40

      Angle valve - NW 40
      port, Pneumatic type

    • MFC (Atovac AFC500)

      MFC (Atovac AFC500)
      a. MFC1 : Ar (1000 SCCM )
      b. MFC2 : CH4 (200 SCCM )
      c. MFC3 : H2 (100 SCCM ) 


      Pneumatic Valve
      a. Ar    input valve
      b. CH4    input valve
      c. H2    input valve
      d. Vent valve
      e. Main Gas input valve

  • Gas Module

    Gas Module
    • Bubbler carrier gas line
    • Bubbler gas line
    • Vent valve
    • Pneumatic Type (4~6kgf/cm3)
    • Bubbler
    • Main gas valve
    • Pneumatic Type (4~6kgf/cm3)
    • Gas manifold
    • Gas valve
    • Max 6 channel
    • Pneumatic Type (4~6kgf/cm3)
    • MFC (Atovac AFC-500)
    • Port - ¼" VCR type

  • Utility Area

    Utility Area
    • Pneumatic pressure switch - TCP SPS-206-01 (*Air Pressure Low)
      Control range : 0~0.6 MPa / Set pressure : 0.3 Mpa
    • Pneumatic regulator
      SYM BW20 (0.05~0.85MPa)
    • Solenoid valve
      Normal close , DC 24V / φ 4mm one touch fitting
    • Water pressure switch - TCP SPS-203-01(*Water Pressure Low)
      Control range : 0~0.3 MPa / Set pressure : 0.2 Mpa
    • Pneumatic port
      φ 6mm one touch fitting
    • Solenoid valve
      Normal close , DC 24V, / φ 4mm one touch fitting
    • Cooling water in/out port
      φ 3/8inch lock fitting
    • Angle valve - NW 40
      port, Pneumatic type

  • Sample Loading End Chamber

    Sample Loading End Chamber
    • Vacuum gauge sensor
      baratron gauge
    • Sample loading door
    • Cooling water in/out port
    • Vacuum gauge for vacuum pressure control valve
      full Scale range: 10 Torr
      lowest suggested pressure for reading: 1 x 10-3 Torr
      lowest suggested pressure for control: 10 Torr
    • Angle valve NW 40 port

  • Gas Supply End Chamber

    Gas Supply End Chamber
    • Door
    • Gas Input port
      ¼ Inch Lock Type Fitting
    • Cooling Water In/Out Port
    • Convection Gauge
      CVG101 (ATM ~ 1 x 12-3)
    • Angle valve NW 40 port

  • Electric Power Panel

    Electric Power Panel
    • Main power magnet switch
      LS GMC-32
    • Rotary pump power magnet
      switch - LS GMC-9 / GTH-22(4~6A)
    • Furnace power magnet switch
      LS GMC-22
    • Main power circuit breaker
      LS ABS-32b (30A)
    • SMPS DC 24 V
      Suntronics VSF30-24

  • TCVD Error Alarm Singnal

    TCVD Error Alarm Singnal
    • When Heater Power Failure, Light Indicator is ON
    • When Heater Over Temp, Light is ON
    • When Cooling Water Light is ON
    • Pneumatic Alarm Light is ON
    • When Rotary pump overcurrent alarm light is ON

  • TCVD Service Tool Box Components

    TCVD Service Tool Box Components
    • Thermocouple 3EA, O-ring, Extra Lamp, Allen wrench, Bolts nuts Etc.

 

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